leak valve

 
 

A leak valve or variable leak valve permits to let a gas into the vacuum chamber at a precisely defined leak rate. The picture shows such a valve. The right hand side is connected to the UHV chamber, the bottom connection to a (usually high purity) gas reservoir. The knob on the top controls the leak rate. Inside the valve, the sealing is achieved between a sapphire plate and a metal gasket.


                                       


 

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